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JC Nabity

美国JC Nabity Lithography Systems  www.jcnabity.com
美国JC Nabity Lithography Systems成立于1988年.公司成功研发了基于改造商品SEM、STEM或FIB的电子束曝光装置(Nanometer Pattern Generation System纳米图形发生系统,简称NPGS,又称电子束微影系统)。电子束曝光技术具有可直接刻画精细图案的优点,且高能电子的波长短(< 1 nm),可避免绕射效应的困扰,是实验室制作微小纳米电子元件最佳的选择。相对于购买昂贵的专用电子束曝光机台,以既有的SEM等为基础,外加电子束控制系统,透过电脑介面控制电子显微镜中电子束之矢量扫描,以进行直接刻画图案,在造价方面可大幅节省,且兼具原SEM 的观测功能,在功能与价格方面均具有优势。由于其具有高分辨率以及低成本等特点,在北美研究机构中,JC Nabity的NPGS是最热销的配套于扫描电镜的电子束微影曝光系统,而且它的应用在世界各地越来越广泛。

NPGS的技术目标是提供一个功能强大的多样化简易操作系统,结合使用市面上已有的扫描电镜、扫描透射电镜或聚焦离子束装置,用来实现艺术级的电子束或离子束平版印刷技术。NPGS能成功满足这个目的,得到了当前众多用户的强烈推荐和一致肯定。
JC Nabity Lithography Systems is the company I started as a graduate student in 1988 after it became apparent that the Nanometer Pattern Generation System (NPGS) was significantly better than any commercial SEM based lithography system available at the time. Through word of mouth recommendations alone, sales increased as I finished my Ph.D. in Physics, and at the end of 1991, I began working full time towards the sales and further refinement of NPGS. The timing was actually quite good, because while the competition had virtually a worldwide monopoly in SEM lithography, their lack of innovation, poor performance history, and incredibly high prices left many researchers wanting a high performance, low-cost system, which is exactly what NPGS provided. Since then, word of mouth recommendations have allowed NPGS to dominate the SEM lithography market in the US, so that now researchers in almost every major research university and many government labs in the US are using NPGS. Meanwhile, the competition has significantly improved their systems (when compared to their monopoly days) and they have significantly lowered their prices (at least on their "entry-level" system), however, NPGS continues to thrive based on the unmatched performance to price ratio that it offers.